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OF SEMICONDUCTORS AND CERAMICS August 20-22, 2003 This workshop is part of a National Science Foundation (NSF) Focused Research Group (FRG) research program.
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Jones B. Arnold and Roland D. Seals Abstract
Jun Qu#, Samuel B.
McSpadden Jr., Peter J. Blau AbstractWith two unique advantages over
other characterization instruments, non-destructive subsurface imaging and
elastic property visualization, Scanning Acoustic Microscopy (SAcM) has
shown significance in material property characterization and flaw
detection. In this study, a high-frequency scanning acoustic
microscope (SAM2000) was used to identify subsurface damage and phase
transformations of semiconductors and ceramics during manufacturing
processes. A variety of ceramic materials machined by different
manufacturing processes have been investigated. Examples include
silicon nitride by grinding and single-point diamond turning, silicon
carbide by diamond wire saw cutting, and zirconia and silicon nitride by
laser dimpling. Cracks were observed on and underlying the ground,
diamond wire saw cut, and laser dimpled surfaces. The SAcM images of
the silicon nitride surfaces processed by single-point diamond turning
showed a layer of smeared like material, which has been proposed to be
amorphous due to high pressure phase transformation during the cutting
process. The thickness of the phase-transformed zone was
proportional to the depth of cutting. Although the SAcM has shown
impressive results, some acoustic images are difficult to interpret since
the image contrast reflects mixed signals of surface topography,
subsurface features, material structures, and mechanical
properties. * Research sponsored by the
U.S. Department of Energy, Assistant Secretary for Energy Efficiency and
Renewable Energy, FreedomCAR and Vehicle Technologies Program, under
contract DE-AC05-00OR22725 with UT-Batelle LLC, Oak Ridge,
Tennessee. # Corresponding author,
P.O. Box 2008 MS 6063, Oak Ridge, TN 37831-6063, Ductile Regime Machining of Silicon Nitride: A Numerical Study Using Drucker-Prager Material Model Satya K. Ajjarapu,
Ronnie R. Fesperman, John A. Patten and Chris Brand Abstract Recently, to account for pressure sensitivity of silicon nitride, a Drucker-Prager yield criterion was implemented into ADVANTEDGE. The parameters in the criterion are chosen so that yielding occurs at very high hydrostatic pressures. Results from these simulations for micro- and submicro-depths of cuts are presented. A parametric study was also carried out to study the effect of cutting speed, depth of cut and rake angle on the pressure fields (and hence on the conditions suitable for ductile machining) in the silicon nitride woripieces. Force data from experiments using a Diamond Turning Machine is also presented. Chip morphology is studied for the machined depths using Scanning Electron Microscopy and ductile-to-brittle transition depth is determined from the chip images. In addition, cutting tools are inspected using Optical Microscope to correlate tool wear to forces and ductile/brittle behavior. The force data from the experimental and numerical analyses are correlated using the ratio of Cutting Force to Chip Area.
Effect of alcohols on diamond
machining of materials Stephen Hsu, NIST Abstract Electrical and Optical Detection of the High Pressure Metallic Phase of Silicon In-situ During Scratching with Diamond: Electrical and Optical Heating of the High Pressure Phase Material and its Effect on the Material’s Hardness John A. Patten, UNC Charlotte
and Western Michigan University Keywords:
High Pressure Phase Transformation, Silicon, Electrical and Optical
measurements, in-situ, Scratching Abstract Extending Electrical
Resistivity Measurements in Micro-scratching of Silicon: Toward Optimal
Thermal Modeling of Ductile Regime Machining for
MEMS/NEMS Abstract Material removal in the ductile regime, which is more attractive for surface quality purposes, was theorized to be possible in the late eighties. Since Ductile Regime Machining (DRM) is favorable, due to the higher quality of the resulting surface, it is required to understand the mechanism by which silicon behaves as a ductile material. This hinges on understanding the energetics of silicon metallization under pressure. Fundamental to such endeavor is the parametric thermal modeling of the DRM process itself. Such a model is not yet possible since the metallic phases of silicon aren't readily amenable to thermal characterization through direct measurements. This being the case, one has to rely on processing indirect measurement data to deduce refined estimates of the thermal transport properties of Silicon. One of the most popular, perhaps more established, measured quantities is the electrical resistivity. In fact many researchers monitor the variation in the electrical resistivity of silicon during indentation to indicate a semi-conductor-to-metal phase transformation. The region of the material under the indenter is metallic. As such, the electrical resistivity and the thermal conductivity of the transformed phase should obey the Wiedman-Franz- Lorenz law. That is both these properties are interrelated and can be estimated if either of them is known along with the temperature at the specific point with any certainty. This paper, therefore, describes a procedure by which the average thermal conductivity of the metallic phase of silicon is extracted from electrical resistivity measurements. The procedure is based on teaming a temperature evaluation code to the resistivity measurements. Thus allowing the extraction of the conductivity as a function of temperature. High Pressure Surface Science
of Semiconductors and Ceramics Abstract During contact interactions, a harder object can leave imprints on the material surface. In particular, when a hard indenter (e.g., diamond) touches the surface of another hard material (ceramic or semiconductor), very high pressures (up to one megabar) can be achieved under the indenter because the contact area in the beginning of the penetration of the indenter into material is small. These pressures can exceed the phase transformation pressure for many materials. Understanding and appreciation of this fact can help to understand the mechanisms of wear, friction and erosion. High shear stresses and flexibility of contact loading conditions allow one to drive phase transformation that cannot occur under hydrostatic stresses, or would occur at much higher pressures. We will describe phase transformations and amorphization that occur in many semiconductors under contact loading such as indentation with hard indenters or scratching, grinding, milling, etc. Contact loading is one of the most common mechanical impacts that materials experience during processing or application. Examples are cutting, polishing, indentation testing, wear, friction and erosion. This kind of loading has a very significant nonhydrostatic component of stress that may lead to dramatic changes in the materials structure, such as amorphization and phase transformation. Simultaneously, processes of plastic deformation, fracture and interactions with the environment and counterbody can occur. The latter have been described in numerous publications, but the processes of phase transformations at the sharp contact were investigated only during past decade and the data obtained have never been summarized. This problem is at the interface between at least three scientific fields, namely materials science, mechanics and solid state physics. Thus, an interdisciplinary approach will be used to describe how and why a nonhydrostatic (shear) stress in the two-body contact drive phase transformations in materials. Mechanically Induced Phase
Transformations Abstract (Revised:
5/2/03) In order to change from one phase to another, a solid must pass over an energy barrier. An important role of shear is to facilitate this. At high temperatures, and/or low rates, it does this in conjunction with thermal activation. At low temperatures, and/or high rates, it does it by destabilizing the initial phase. Shear strains cause destabilization of molecules and solids through their effects on electronic structures. Shear tends to reduce energy gaps to values that can be overcome by the energies of zero-point vibrations. Pressure sometimes has the opposite effect, tending to stabilize electronic structures. In other cases hydrostatic reduces gaps and leads to metallization. The fact that energy densities are often more pertinent than bare energies in determining the properties of solids is also discussed. Molecular Dynamics Simulations
of A. Noreyan,1 J.G.
Amar,2 and I.
Marinescu1 Abstract Nanoindentation and Raman Microspectroscopy Studies of Boron Carbide Single Crystals Vladislav Domnich, Thomas
Juliano, Daibin Ge, Yury Gogotsi Abstract Nano/Micro-Tribology of
Chemical-Mechanical Polishing Tel.
direct: 408-376-4041 Abstract New Nanoindentation and Scanning Probe Tools and Techniques Warren C. Oliver Abstract
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Wednesday, August 20 |
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8:00 a.m. |
Organizing Committee Meeting | ||
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9:00 a.m.—1:00 p.m. |
Registration | ||
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9:00 a.m.—12:00 p.m. |
Informal Meetings (Set-Up Posters) | ||
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1:00 p.m.—1:15 p.m. |
Welcome – John Patten (UNCC/WMU) | ||
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1:15 p.m. |
Analytical & Theoretical Analysis; Session Chair Bob Nemanich | ||
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Y. Gogotsi (Drexel) High Pressure Surface Science and Engineering | ||
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R. Scattergood (NCSU) Scribing of Silicon and Ceramics | ||
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J. Patten/L. Dong (UNCC/WMU) In-situ Detection of the High Pressure Metallic Phase | ||
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3:00 p.m.—3:30 p.m. |
Break | ||
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3:30 p.m. |
Modeling and Simulation | ||
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Zhang (US-A) Deformation Mechanisms of Silicon | ||
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H. Cherukuri/S. Kumar (UNCC) Ductile Regime Machining of Silicon Nitride | ||
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H. Abdel-Aal Thermal Modeling of Ductile Regime Machining | ||
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5:00 p.m.—7:00 p.m. |
Reception, Cameron Lobby (Posters Session, Room 119) | ||
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Thursday, August 21 |
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8:00 a.m. |
Coffee and Registration | ||
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9:00 a.m.—12:00 p.m. |
Experimental; Session Chair Ron Scattergood | ||
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Nano-Indenting | ||
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G. Pharr (UT-K) Phase Transformation and Cracking in Brittle Materials | ||
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W. Oliver (MTS) New Nanoindentation and Scanning Probe Tools and Techniques | ||
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Break | ||
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Scratching/Cutting/Machining/Grinding | ||
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P. Pirouz (CWRU) Plasticity and Fracture of Semiconductors | ||
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E. Marsh (Penn State) Ductile Machining of Brittle Materials | ||
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J. Arnold (DOE/Y-12) Ceramic Machining using Single Point Carbon Nanotube Tools | ||
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12:00 p.m.—1:30 p.m. |
Lunch | ||
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1:30 p.m.—5:00 p.m. |
Experimental and Analytical Methods; Session Chair George Pharr | ||
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Cutting Fluids and CMP Slurries | ||
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S. Hsu (NIST) Effects of Alcohols on Diamond Machining of Materials | ||
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N. Gitis (CT) Tribology of Chemical Mechanical Polishing | ||
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Break | ||
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Micro Raman/SEM/TEM | ||
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R. Nemanich (NCSU) UV Raman Scattering in SiC Indents | ||
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S. Domnich (Drexel) Raman Microspectroscopy Studies of Boron Carbide | ||
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Acoustic Microscope | ||
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S. McSpadden/Jun Qu (ORNL) Characterization of Subsurface Damage and Phase Transformations of Ceramics Using Scanning Acoustic Microscopy* | ||
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5:00 p.m.—6:00 p.m. |
Lecture—J. J. Gilman (UCLA) Mechanically Induced Phase Transformations | ||
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6:00—8:00 p.m. |
Dinner in Prospector | ||
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Friday, August 22 |
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8:00 a.m. |
Coffee and Registration | ||
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9:00 a.m.—12:00 p.m. |
Summary Session; Session Chair John Patten | ||
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9:00 a.m.—10:00 a.m. |
Other Materials and Processes of Interest | ||
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A. Noreyan, J.G. Amar, and I. Marinescu (University of Toledo) Molecular Dynamics Simulations of Nanoindentation of 3C SiC with Diamond Indenter | ||
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J. Patten (UNCC) Machining of SiC | ||
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10:00 a.m.—11:00 a.m. |
Consensus regarding high pressure phase transformations in ceramics | ||
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11:00 a.m.—12:00 p.m. |
Works in Progress, Future Work-collaborations, workshops, etc. | ||
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Closing | ||
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12:00 p.m.—1:00 p.m. |
Lunch on your own – Tour Campus | ||
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1:00 p.m.—3:00 p.m. |
Tours: C-ARC, CPM | ||
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3:00 p.m.—5:00 p.m. |
Information meeting (FRG-HPPT) (Take down posters) | ||
Guidelines for Submitting Posters to the HPPT Summer, 2003 Workshop
The Actual Poster at the Workshop
The workshop will provide each poster presenter with a white foam-core board (1/8” thick; 32” wide x 40” tall) on an easel. The presenter should bring with him or her materials (poster) to affix to the core board that contain the content/substance of the presentation. Materials (poster) can be affixed to the foam-core board using push-pins or tacks, or a spray/brushed adhesive (the workshop will provide push-pins and tacks, and an adhesive that presenters can use).
The typesizes, the fonts, the boldness of the materials (the text and graphics; any three-dimensional objects) affixed to the core board should be selected by the presenter with a view to making the poster readable to a person standing some distance from it. A presenter might prepare, and affix to the board, a series of individual strips of paper with headings and sub-headings; a series of 8.5 x 11” papers; three-dimensional objects; etc. A Word document or Power Point Presentation or Graphic are suitable for poster material.
The CD of Papers/Poster Presentations
The content/substance of each poster presentation will be included, to the extent that its format is conducive to this, on the CD of papers/poster sessions that will be distributed to workshop participants. While the poster itself can be a mosaic of two- and three-dimensional objects affixed to it, to be included on the CD those objects need to be translated into a clear, well organized, linear Word, Power Point, PDF or HTML document.
The following guidelines are provided merely to ensure some consistency in format in the presentation of the poster on the CD that will be distributed to workshop participants.
Authors should follow the conventions of their academic discipline with respect to references, scientific notation, diagrams, figures, etc.
Please
prepare the materials in a recent version of the software
used.
Guidelines for Submitting Papers to the HPPT Summer, 2003 Workshop
These guidelines are provided merely to ensure some consistency in format in the presentation of the papers in the notebook in which they will be bound, and on the CD of the papers that will also be distributed to workshop participants.
Authors should follow the conventions of their academic discipline with respect to references, scientific notation, diagrams, figures, etc.
Registration
Options – Four Easy Ways To Register
1. Online. Please note: Online registration is available only to those paying with a MasterCard or Visa and possessing a U.S. mailing address/phone number and social security number. Others should use one of the three registration options below. If you have questions, or if you require assistance in completing the registration process, please contact Lyndee Champion by phone at 704-687-4452 or by e-mail at lchampio@email.uncc.edu.
2. Fax completed registration form
(see Printable
Registration Form) with MasterCard/Visa information or purchase
order number/information to:
704-687-3158.
3. Mail completed registration form (see Printable Registration Form) with check (made payable to UNC Charlotte Continuing Education), MasterCard/Visa information, or purchase order number/information to:
HPPT Workshop
Continuing Education
The University of North Carolina at Charlotte
9201 University City Blvd.
Charlotte, NC
28223-0001
4. Telephone requested registration
information (see Printable
Registration Form) with MasterCard/Visa information, or purchase
order number/information to:
704-687-4452.
Accommodation of Disabilities
Accommodations will be made available upon request for persons with
disabilities. Accommodations
must be specifically identified in writing at least two weeks prior to the
program.
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